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L. Cui, N. Marturi, E. Marchand, S. Dembélé, N. Piat. Closed-Loop Autofocus Scheme for Scanning Electron Microscope. In Int. Symp. of Optomechatronics Technology, ISOT 2015, Neuchatel, Switzeland, October 2015.

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Eric Marchand

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   Author = {Cui, L. and Marturi, N. and Marchand, E. and Dembélé, S. and Piat, N.},
   Title = {Closed-Loop Autofocus Scheme for Scanning Electron Microscope},
   BookTitle = {Int. Symp. of Optomechatronics Technology, ISOT 2015},
   Address = {Neuchatel, Switzeland},
   Month = {October},
   Year = {2015}

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