Jump to : Download | Abstract | Contact | BibTex reference | EndNote reference |


L. Cui, E. Marchand. Calibration of Scanning Electron Microscope using a multi-images non-linear minimization process. In IEEE Int. Conf. on Robotics and Automation, ICRA'14, Pages 5191-5196, Hong Kong, China, June 2014.

Download [help]

Download paper: Doi page

Download Hal paper: Hal : Hyper Archive en ligne

Download paper: Adobe portable document (pdf) pdf

Copyright notice:

This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. These works may not be reposted without the explicit permission of the copyright holder. This page is automatically generated by bib2html v217, © Inria 2002-2024, Projet Lagadic/Rainbow


In this paper, a novel approach of SEM calibration based on non-linear minimization process is presented. The SEM calibration for the intrinsic parameters are achieved by an iterative non-linear optimization algorithm which minimize the registration error between the current estimated position of the pattern and its observed position. The calibration can be achieved by one image and multiple images of calibration pattern. Perspective and parallel projection models are addressed in this approach. The experimental results show the efficiency and accuracy of the proposed method


Eric Marchand

BibTex Reference

   Author = {Cui, L. and Marchand, E.},
   Title = {Calibration of Scanning Electron Microscope using a multi-images non-linear minimization process},
   BookTitle = {IEEE Int. Conf. on Robotics and Automation, ICRA'14},
   Pages = {5191--5196},
   Address = {Hong Kong, China},
   Month = {June},
   Year = {2014}

EndNote Reference [help]

Get EndNote Reference (.ref)